| Parameter | Unit | Etching | Deposition Interlayer Ni/Cr/- | Deposition PtIr |
| Temperature | [˚C] | 350 | 350 | 350 |
| Basepressure | [Pa] | 3 × 10−3 | 3 × 10−3 | 3 × 10−3 |
| Pressure | [Pa] | 1 | 0.5 | 0.5 |
| Cathode power | [W] | - | 50 | 50 |
| Bias voltage | [V] | −1024 | −41/−24/- | 41 |